Zygo Corporation公司推出了ZPS絕對位置測量系統，能夠實現各種先進應用的高精度測量和位置控制，如可變形光學器件，透鏡定位系統和精細平台控制。
該系統支持最大64同步通道的非接觸，高精度絕對位置測量，該系統主要包括一種新型超緊湊光學傳感器及硬件平台，能夠在1.2mm範圍內提供極佳的靈敏度，分辨率及穩定性。 這款先進的光學傳感器不會生產熱量，並且無視電磁干擾，測量分辨率可達0.01nm，測量穩定性優於1nm /天。
此外，這種ZPS絕對位置測量系統使用光纜傳輸，可進行遠距離傳感測量，不會影響測量數據的精度。其可選配件可實現環境狀況改變時的實時自動補償。
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.
The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables.
Applications
The ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.
Click on each of the thumbnail images below to see illustrations of sample applications.
Source:https://www.zygo.com/?/met/absolutepositionmeasurement/
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